| 摘要 |
PURPOSE: A polishing apparatus is provided to accurately determine the lifespan of a polishing pad by diagnosing the state of polishing side of a polishing pad through a motor current rotating a polishing table and a motor current rotating a top ring. CONSTITUTION: A top ring fluctuation arm is connected to an upper end of a supporting shaft. A top ring shaft(18) is installed in the free end of the top ring fluctuation arm. A top ring(20) is driven by a top ring rotary motor(71). A diagnostic part(47) processes various data. A polishing table(12) is connected to a table rotation motor(70) through a table axis. A dresser(50) dresses the abrasive side of a grinding pad(22). |
