APPARATUS FOR MANUFACTURING OF SOLAR CELL

摘要

PURPOSE: An apparatus for manufacturing of a solar cell is provided to improve efficiency by dispersing a reaction gas evenly in a plasma vapor deposition and improving the unevenness of a thin film or a solar cell. CONSTITUTION: A substrate(370) is arranged within a chamber(310). A gas exhaust port(320) supplies a gas into a chamber. A dispersion section(330) decentralizes the gas provided from the gas exhaust port. A second distributor plate(340) distributes the gas provided from the dispersion section. A first distributor plate(350) distributes the gas passing through the second distributor plate again.