| 摘要 |
<p>An integrated microelectromechanical structure (30; 30'; 30") is provided with: a driving mass (3), anchored to a substrate (2a) via elastic anchorage elements (8a, 8b) and designed to be actuated in a plane (xy) with a driving movement; and a first sensing mass (15a; 15a') and a second sensing mass (15b; 15b'), suspended within, and coupled to, the driving mass (3) via respective elastic supporting elements (18) so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first (15a; 15a') and the second (15b; 15b') sensing masses are connected together via elastic coupling elements (32a, 32b), configured to couple their modes of vibration.</p> |
