发明名称 Vorrichtung zur Ablagerung dünner Schichten durch Kathodenzerstäubung auf beiden Seiten eines oder mehrerer Metallträger
摘要 Apparatus and method for depositing thin layers by cathodic sputtering onto metallic supports wherein a rarefied gaseous enclosure is provided having an ionic bombardment stage and a cathodic sputtering stage with means for transferring the supports from the first stage to the second stage without cooling or admitting air, each stage acting simultaneously on both surfaces of the metal supports.
申请公布号 AT304220(B) 申请公布日期 1972.12.27
申请号 AT19710006013 申请日期 1971.07.09
申请人 FIRMA PROGIL 发明人
分类号 C23C14/36;C23C14/02;C23C14/35;C23C14/56;C23F1/00;H01J37/34;H01M4/88 主分类号 C23C14/36
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