A Variable Type Vacuum Table,申请号KR20090091613-传众专利搜索

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发明名称	A Variable Type Vacuum Table
摘要
申请公布号	KR101117256(B1)	申请公布日期	2012.03.16
申请号	KR20090091613	申请日期	2009.09.28
申请人		发明人
分类号	H01L21/687;B23Q3/08	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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