发明名称 Method for evaluating gluing energy between plates in machine, involves calculating gluing energy based on contact surface between glued plates, actual separation distance between gluing surfaces and parameters of surface state
摘要 <p>The method involves measuring parameters (S1) of state of surface formed on gluing surfaces of plates before gluing by a measurement unit e.g. atomic force microscope, and evaluating a contact surface (S2) between the glued plates. An actual separation distance between the gluing surfaces is measured (S3). Gluing energy is calculated (S4) based on the evaluated contact surface, the measured distance and the parameters, where the energy is calculated from a formula equal to a multiplication of a difference of attraction and repulsion forces among the plates and the contact surface. Independent claims are also included for the following: (1) a computer program comprising instructions for executing steps of a method of evaluation of gluing energy between plates (2) a computer readable recording medium for recording a computer program comprising instructions for executing steps of a method of evaluation of gluing energy between plates (3) an apparatus for evaluation of gluing energy between plates by molecular adhesion.</p>
申请公布号 FR2964742(A1) 申请公布日期 2012.03.16
申请号 FR20100057313 申请日期 2010.09.14
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES 发明人 RADU IONUT
分类号 G01N19/04;H01L21/66 主分类号 G01N19/04
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