APPARATUS FOR INGOT GROWING

摘要

PURPOSE: An ingot growing apparatus is provided to prevent the damage of a component by minimizing the vibration due to the operation of a device. CONSTITUTION: A housing(40) is arranged in the upper side of a chamber. An elevating unit(50) is arranged in the inner side of the housing. The elevating unit lifts an ingot from fused raw materials. A crucible is installed in the inner side of the chamber and accepts the fused raw materials. A heater is arranged on one side of the crucible and heats the crucible. A supporting frame(60) comprises a pair of support plates and splice plates. The supporting frame supports the housing. A vibration reducing unit prevents the vibration and separation of the housing. A vibration sensor senses the vibration of the housing. A vibration control unit controls the vibration reducing unit and the vibration sensor.