发明名称 APPARATUS OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL AND METHOD OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL
摘要 Disclosed is an apparatus (1) for manufacturing a silicon carbide single crystal, which comprises: a crucible main body (11) that is opened at the top and holds a sublimation material (50) in the bottom portion (11a); a cover member (12) which covers the upper opening (11b) of the crucible main body (11); and a cylindrical guide member (70) which is provided in the crucible main body (11) for guiding the growth of the silicon carbide single crystal when the silicon carbide single crystal is grown from a seed crystal (60). The guide member (70) is separably configured of a first divided body and a second divided body.
申请公布号 US2012060749(A1) 申请公布日期 2012.03.15
申请号 US201013264624 申请日期 2010.03.19
申请人 OKUNO KENICHIRO;BRIDGESTONE CORPORATION 发明人 OKUNO KENICHIRO
分类号 C30B23/02;C30B23/06 主分类号 C30B23/02
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