TREATMENT LIQUID FOR INHIBITING PATTERN COLLAPSE IN MICROSTRUCTURES, AND MICROSTRUCTURE MANUFACTURING METHOD USING SAID TREATMENT LIQUID

摘要

A treatment liquid for inhibiting pattern collapse in microstructures comprising silicon oxide, said treatment liquid containing water and at least one of the following: an ammonium halide that has a fluoroalkyl group; a betaine compound that has a fluoroalkyl group; or an amine oxide compound that has a fluoroalkyl group. Also, a method for manufacturing microstructures comprising silicon oxide, said method using the aforementioned treatment liquid.