METHOD FOR ETCHING GROUP III NITRIDE SEMICONDUCOTR,申请号KR20080113570-传众专利搜索

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发明名称	METHOD FOR ETCHING GROUP III NITRIDE SEMICONDUCOTR
摘要
申请公布号	KR101123009(B1)	申请公布日期	2012.03.15
申请号	KR20080113570	申请日期	2008.11.14
申请人		发明人
分类号	H01L33/22	主分类号	H01L33/22
代理机构		代理人
主权项
地址

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