发明名称 PROBE CARD STRUCTURE SIMULTANEOUSLY ADAPTABLE TO DIFFERENT TEST APPARATUS OF DIFFERENT SPECIFICATION
摘要 <P>PROBLEM TO BE SOLVED: To provide a probe card structure simultaneously adaptable to different test apparatuses of different specifications which is designed to have a single probe card structure simultaneously adaptable to different IC test apparatuses. <P>SOLUTION: A probe card structure simultaneously adaptable to different test apparatuses of different specifications includes a specification conversion interface unit 5 disposed on a probe card of a first specification, by which the probe card without the specification conversion interface unit 5 can be mounted on an originally adapted test apparatus of the first specification to carry out a test process. Moreover, a reinforcement member 4 of a second specification is associated with the specification conversion interface unit 5, and the probe card is mounted on a test apparatus of the second specification. Accordingly, the probe card of a single specification can be simultaneously applied to different test apparatuses of different specifications. The adaptation to different specifications of test apparatuses makes it possible to significantly save cost and time for repeatedly manufacturing different specifications of probe cards. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012053030(A) 申请公布日期 2012.03.15
申请号 JP20110128198 申请日期 2011.06.08
申请人 HERMES TESTING SYSTEMS INC 发明人 HONG KOEN-YO;JIN CHI-YO
分类号 G01R1/073;G01R31/26;H01L21/66 主分类号 G01R1/073
代理机构 代理人
主权项
地址