| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic wiring board for a probe card, which is capable of preventing separation between an insulating base and an internal electrode layer, and to provide a probe card using the same. <P>SOLUTION: The wiring board comprises an internal wiring layer which is formed inside the insulating base made of a sintered compact having mullite particles as main crystal particles and contains 40 to 60 vol.% copper and 40 to 60 vol.% tungsten and/or molybdenum. The wiring board contains the mullite particles containing a large amount of alumina, as main crystal particles existing around the internal electrode layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
