| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a support substrate for a laminated substrate which can impregnate silicon enough in a silicon carbide sintered body even when the density of the silicon carbide sintered body is comparatively high. <P>SOLUTION: The method for manufacturing the support substrate for the laminated substrate (support substrate) includes: a step S1 of providing an impregnating introduction part to impregnate the silicon to the silicon carbide sintered body; a step S2 of forming a slurry layer that contains at least a silicon carbide on an external surface of the silicon carbide sintered body; and a step S3 of impregnating the molten silicon to the silicon carbide sintered body having the slurry layer formed thereto. <P>COPYRIGHT: (C)2012,JPO&INPIT |
