发明名称 DYNAMIC SYSTEM FOR VARIABLE HEATING OR COOLING OF LINEARLY CONVEYED SUBSTRATES
摘要 A system is provided for heating or cooling discrete, linearly conveyed substrates having a gap between a trailing edge of a first substrate and a leading edge of a following substrate in a conveyance direction. The system includes a chamber, and a conveyor operably configured within the chamber to move the substrates through at a conveyance rate. A plurality of individually controlled temperature control units, for example heating or cooling units, are disposed linearly within the chamber along the conveyance direction. A controller is in communication with the temperature control units and is configured to cycle output of the temperature control units from a steady-state temperature output as a function of the spatial position of the conveyed substrates within the chamber relative to the temperature control units so as to decrease temperature variances in the substrates caused by movement of the substrates through the chamber.
申请公布号 US2012064657(A1) 申请公布日期 2012.03.15
申请号 US201113070673 申请日期 2011.03.24
申请人 PEPLER KEVIN MICHAEL;JONES JAMES JOSEPH;HALLORAN SEAN TIMOTHY;PRIMESTAR SOLAR, INC. 发明人 PEPLER KEVIN MICHAEL;JONES JAMES JOSEPH;HALLORAN SEAN TIMOTHY
分类号 H01L31/18;B05C11/00;G05D23/00 主分类号 H01L31/18
代理机构 代理人
主权项
地址