VAPOR DELIVERY SYSTEM FOR USE IN IMPRINT LITHOGRAPHY
摘要
Described are systems and method of using a vapor delivery system for enabling delivery of an adhesion promoter material during an imprint lithography process.
申请公布号
WO2012033943(A2)
申请公布日期
2012.03.15
申请号
WO2011US50874
申请日期
2011.09.08
申请人
MOLECULAR IMPRINTS, INC.
发明人
YE, ZHENGMAO;RAMOS, RICK;FLETCHER, EDWARD, B.;JONES, CHRISTOPHER, E.;LABRAKE, DWAYNE, L.
