申请人 |
APPLIED MATERIALS, INC.;WARD, MICHAEL G.;PEIDOUS, IGOR V.;CHIANG, SUNNY;TA, YEN B.;DARLAK, ANDREW;PORSHNEV, PETER I.;SRINIVASAN, SWAMINATHAN |
发明人 |
WARD, MICHAEL G.;PEIDOUS, IGOR V.;CHIANG, SUNNY;DARLAK, ANDREW;PORSHNEV, PETER I.;SRINIVASAN, SWAMINATHAN |