发明名称 |
LOW DRIFT SCANNING PROBE MICROSCOPE |
摘要 |
<p>A scanning probe microscope, such as an atomic force microscope, include a z-stage and a bridge structure comprised substantially free of Invar. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. A drift compensation system is provided to reduce thermal drift of the z-stage and the bridge. The drift compensation system includes heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature.</p> |
申请公布号 |
WO2011116389(A3) |
申请公布日期 |
2012.03.15 |
申请号 |
WO2011US29232 |
申请日期 |
2011.03.21 |
申请人 |
BRUKER NANO, INC.;RUITER, ANTHONIUS, G.;MITTEL, HENRY |
发明人 |
RUITER, ANTHONIUS, G.;MITTEL, HENRY |
分类号 |
G01Q60/24;G01Q30/10 |
主分类号 |
G01Q60/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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