| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminated structure in which the contamination of an indium target by impurities is favorably suppressed, and to provide a method for production thereof. <P>SOLUTION: The laminated structure includes: a backing plate; an impurity diffusion-preventive layer which comprises a thin film composed of at least one metal selected from Fe, W, Ta, Te, Nb, Mo, S and Si, and is formed of the backing plate; and an indium target formed on the impurity diffusion-preventive layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
