| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polyester film coping with various problems occurring in reducing wire thickness and increasing density, and is suitable for a supporting film for interlayer insulating material. <P>SOLUTION: The polyester film for supporting interlayer insulating material includes a coated layer formed on one surface of the polyester film whose centerline average roughness (SRa) of the other film surface is 0.5-15 nm, and an oligomer amount on a surface of the coated layer after heat treatment at 180°C for 30 minutes is 3.0 mg/m<SP POS="POST">2</SP>or less. <P>COPYRIGHT: (C)2012,JPO&INPIT |
