发明名称 SURFACE ACOUSTIC WAVE DEVICE, ELECTRONIC APPARATUS, AND SENSOR APPARATUS
摘要 A SAW device 11 has an IDT which is provided on the principal surface of a quartz crystal substrate 12 having Euler angles (&minus;1.5°&nlE;&phgr;&nlE;1.5°, 117°&nlE;&thetas;&nlE;142°, 42.79°&nlE;|&psi;|&nlE;49.47°) and excites a SAW in a stopband upper end mode, and a pair of reflectors which are arranged on both sides of the IDT. Inter-electrode-finger grooves are recessed between the electrode fingers of the IDT, and inter-conductor-strip grooves are recessed between the conductor strips of the reflectors. The wavelength &lambda; of the SAW and the depth G of the inter-electrode-finger grooves satisfy 0.01&lambda;&nlE;G. An IDT line occupancy &eegr; and the depth G of the inter-electrode-finger grooves satisfy a predetermined relational expression. The IDT line occupancy &eegr; and a reflector line occupancy &eegr;r satisfy the relationship &eegr;<&eegr;r. Therefore, an excellent frequency-temperature characteristic and a high Q value in an operation temperature range are realized simultaneously.
申请公布号 US2012062329(A1) 申请公布日期 2012.03.15
申请号 US201113223363 申请日期 2011.09.01
申请人 YAMANAKA KUNIHITO;SEIKO EPSON CORPORATION 发明人 YAMANAKA KUNIHITO
分类号 H01L41/047;H03B5/32 主分类号 H01L41/047
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