Spectrometer for detecting opto-electronic material properties of semiconductor probe in industrial field, has optic element arranged in optical path of measuring beam, and detector detecting emitted light for acquisition of probe

摘要

#CMT# #/CMT# The spectrometer (10) has a laser source (14) generating a measuring beam (16). An optic element is arranged in an optical path of the measuring beam to deflect the measuring beam at an angle (phi) to a semiconductor probe (12) to be measured. The optic element is laid out to vary the angle during measurement according to patterns predeterminable of a control unit (22). A detector (26) detects emitted light for acquisition of the semiconductor probe. The optic element comprises a mirror (18) movable in the optical path of the measuring beam. #CMT# : #/CMT# An independent claim is also included for a method for operating a spectrometer. #CMT#USE : #/CMT# Spectrometer for detecting opto-electronic material properties of a semiconductor probe in an industrial field. #CMT#ADVANTAGE : #/CMT# The spectrometer enables rapid and cost-effective measurement of photoluminescence, and detects spatially and spectrally resolved intensity distribution of photoluminescence for the semiconductor probe. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a schematic view of a spectrometer. phi : Angle 10 : Spectrometer 12 : Semiconductor probe 14 : Laser source 16 : Measuring beam 18 : Mirror 22 : Control unit 26 : Detector.