| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lamination device and lamination method which reduce warpage or the like of a transparent substrate constituting a workpiece, can reduce a lamination time, and can maintain product quality higher than predetermined quality, even when one or more workpieces are simultaneously delivered to one lamination device to be laminated. <P>SOLUTION: The lamination device 100 includes an upper chamber 113 partitioned by a diaphragm 112 and a lower chamber 121 provided with a heat plate 122, and delivers the workpiece 10 by a conveyance sheet 130 which travels over the heat plate and laminates it. The heat plate is provided with a lifting member 400. The lamination device is configured such that when the workpiece is delivered into a lamination section 101, the lifting member 400 is raised, and the conveyance sheet travels in a raised state from the heat plate. When the workpiece on the conveyance sheet is delivered to a predetermined position above the heat sheet, the lifting member 400 is lowered, and the workpiece is placed on the heat sheet and laminated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
