| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system for delivery of reagents from solid sources thereof. <P>SOLUTION: The system (10) for delivery of the reagent from the solid source thereof includes a structure (16, 22, 24) arranged to retain a solid source material (30) in confinement by at least a part of the structure, for heating and generation of vapor from the solid source material by volatilization thereof, a heat source (82) arranged to heat the solid source material for such volatilization, and a vapor dispensing assembly (52, 54) arranged to discharge the vapor from the system. A high conductance valve (1510) includes a valve body (1512) in which inlet and outlet passages are substantially perpendicular to one another, with their interior extremities communicating with a valve chamber (1536) containing a selectively positionable valve element movable between a fully open and fully closed position. <P>COPYRIGHT: (C)2012,JPO&INPIT |
