发明名称 CIRCUIT BOARD, METHOD OF MANUFACTURING THE CIRCUIT BOARD, AND SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a circuit board having excellent workability of a via hole, a method of manufacturing the circuit board, and a semiconductor device. <P>SOLUTION: A method of manufacturing a circuit board 1 comprises the steps of: preparing a laminated plate in which an insulating layer 21 and a metal layer 11 that is formed on at least one surface of the insulating layer 21 and has a thickness of 2.0 &mu;m or more to 12 &mu;m or less are stacked; forming through holes 19 in the insulating layer 21 by irradiating the selectively removed portion with laser after the metal layer 11 is selectively removed; removing a desired thickness of the metal layer 11 by etching; and forming a conductive layer 15 on the metal layer 11 and the inner wall surfaces of the through holes 19. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012054382(A) 申请公布日期 2012.03.15
申请号 JP20100195437 申请日期 2010.09.01
申请人 SUMITOMO BAKELITE CO LTD 发明人 NISHIKAWA YOSHIKI;ITO YUKA
分类号 H05K3/42;H01L23/12;H05K3/00;H05K3/06;H05K3/18 主分类号 H05K3/42
代理机构 代理人
主权项
地址