| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve higher exposure sensitivity of an inorganic resist material in a method of manufacturing a master disk using the inorganic resist material. <P>SOLUTION: A method of manufacturing a master disk for manufacturing a stamper for an optical recording medium having a predetermined irregular pattern shape includes: a resist layer formation step for forming, on a substrate, a resist layer made of an inorganic resist material; and an irregular pattern formation step for forming an irregular pattern shape by performing an exposure process and a development process on the resist layer. Before the resist layer formation step, the method also includes: an interlayer formation step for providing an interlayer between the substrate and the resist layer; and a surface treatment step for performing a surface treatment on a surface of the interlayer by reverse sputtering. <P>COPYRIGHT: (C)2012,JPO&INPIT |
