| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor device probing apparatus capable of increasing the speed of electrical test for a semiconductor device. <P>SOLUTION: The semiconductor device probing apparatus comprises: a housing configured to define a test chamber; a device holder 70 arranged in the housing and on which at least of one device 62 to be tested is to be loaded; and at least one probe stage 50 arranged in the housing. The probe stage 50 comprises: a base 52; a holding arm 90 having a holding part 92 pivotally rotatably attached to the base 52 and holding at least one probe 58; and a stepper 80 arranged on the base 52. The stepper 80 is configured that the holding arm 90 downwardly moves the probe 58 in response to the electrical signal to contact with the device 62 to be tested, and upwardly moves the probe 58 to separate the probe 58 from the device 62 to be tested, thereby performing a vertical movement of the probe 58 with higher frequency than 6 cycles per second. <P>COPYRIGHT: (C)2012,JPO&INPIT |
