发明名称 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH BURIED BIT LINES
摘要 A method for fabricating a semiconductor device includes forming a plurality of bodies isolated by trenches by etching a substrate, forming a buried bit line gap-filling a portion of each trench, forming an etch stop layer on an upper surface of the buried bit line; and forming a word line extended in a direction crossing the buried bit line over the etch stop layer.
申请公布号 US2012064704(A1) 申请公布日期 2012.03.15
申请号 US201113080415 申请日期 2011.04.05
申请人 KIM TAE-KYUN 发明人 KIM TAE-KYUN
分类号 H01L21/265;H01L21/263;H01L21/28 主分类号 H01L21/265
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