PLASMA TORCH FOR TREATING WASTE AIR OF CHEMICAL VAPOR DEPOSITION PROCESSING

摘要

PURPOSE: A plasma torch for the treatment of waste gas in a chemical vapor deposition process is provided to efficiently decompose fluoride compound included in waste gas by the efficient generation of plasma. CONSTITUTION: A top cover(130) is formed in order to cover the upper end of a cathode electrode(110). A body(140) is placed on the bottom of the top cover. An anode electrode(120) is placed inside the body. The anode electrode comprises an eddy production unit(120a) which is projected inward in order to cover the bottom of the cathode electrode. A first insulation part(150) is placed between the top cover and the body.