发明名称 METHODS AND SYSTEMS FOR FORMING FUNCTIONALLY GRADED FILMS BY SPRAY PYROLYSIS
摘要 Method and system for forming a plurality of cadmium-sulfide layers. The method includes preparing a first solution and a second solution. The method further includes loading at least the first solution and the second solution into a pyrolysis-deposition system and placing a target structure into the pyrolysis-depositions system. The method further includes spraying the first solution through one or more first nozzles towards the target structure, forming, from the sprayed first solution, the first cadmium-sulfide layer, directly or indirectly, on the target structure, spraying the second solution through one or more second nozzles towards the target structure with at least the first cadmium-sulfide layer, and forming, from the sprayed second solution, the second cadmium-sulfide layer directly or indirectly, on the target structure. The first cadmium-sulfide layer includes a first cadmium-sulfide material the second cadmium-sulfide layer includes a second cadmium-sulfide material that are different in at least one material property.
申请公布号 US2012060924(A1) 申请公布日期 2012.03.15
申请号 US201113226200 申请日期 2011.09.06
申请人 MATUS YURIY B.;MOSTOVOY ROMAN;ALION, INC. 发明人 MATUS YURIY B.;MOSTOVOY ROMAN
分类号 H01L31/0272;B05B1/00;B05B15/00;H01L31/18 主分类号 H01L31/0272
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