发明名称 |
METHOD TO ENHANCE POLISHING PERFORMANCE OF ABRASIVE CHARGED STRUCTURED POLYMER SUBSTRATES |
摘要 |
The intersection of discrete polishing islands staggered in a curvilinear shape with a workpiece maintains a substantially uniform film thickness throughout the polishing operation and also leading to a stable polishing operation due to the substantially invariant pressurization. |
申请公布号 |
US2012064808(A1) |
申请公布日期 |
2012.03.15 |
申请号 |
US201113050577 |
申请日期 |
2011.03.17 |
申请人 |
BOUTAGHOU ZINE-EDDINE;BOUTAGHOU LLC |
发明人 |
BOUTAGHOU ZINE-EDDINE |
分类号 |
B24D11/00 |
主分类号 |
B24D11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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