发明名称 TEMPERATURE MEASURING APPARATUS AND TEMPERATURE MEASURING METHOD
摘要 The temperature measuring apparatus includes: a light source; a first wavelength-dividing unit which wavelength-divides a light from the light source into m lights whose wavelength bands are different from one another; m first dividing units which divides each of the m lights from the first wavelength-dividing unit into n lights; a transmitting unit which transmits lights from the m first dividing unit to measurement points of an object to be measured; a light receiving unit which receives a light reflected by each of the measurement points; and a temperature calculating unit which calculates a temperature of each of the measurement points based on a waveform of the light received by the light receiving unit.
申请公布号 US2012063486(A1) 申请公布日期 2012.03.15
申请号 US201113231027 申请日期 2011.09.13
申请人 YAMAWAKU JUN;KOSHIMIZU CHISHIO;MATSUDO TATSUO;NAGAI KENJI;TOKYO ELECTRON LIMITED 发明人 YAMAWAKU JUN;KOSHIMIZU CHISHIO;MATSUDO TATSUO;NAGAI KENJI
分类号 G01K11/12 主分类号 G01K11/12
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