发明名称 |
TEMPERATURE MEASURING APPARATUS AND TEMPERATURE MEASURING METHOD |
摘要 |
The temperature measuring apparatus includes: a light source; a first wavelength-dividing unit which wavelength-divides a light from the light source into m lights whose wavelength bands are different from one another; m first dividing units which divides each of the m lights from the first wavelength-dividing unit into n lights; a transmitting unit which transmits lights from the m first dividing unit to measurement points of an object to be measured; a light receiving unit which receives a light reflected by each of the measurement points; and a temperature calculating unit which calculates a temperature of each of the measurement points based on a waveform of the light received by the light receiving unit.
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申请公布号 |
US2012063486(A1) |
申请公布日期 |
2012.03.15 |
申请号 |
US201113231027 |
申请日期 |
2011.09.13 |
申请人 |
YAMAWAKU JUN;KOSHIMIZU CHISHIO;MATSUDO TATSUO;NAGAI KENJI;TOKYO ELECTRON LIMITED |
发明人 |
YAMAWAKU JUN;KOSHIMIZU CHISHIO;MATSUDO TATSUO;NAGAI KENJI |
分类号 |
G01K11/12 |
主分类号 |
G01K11/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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