PLASMA TORCH FOR TREATING WASTE AIR OF ETCHING PROCESSING

摘要

PURPOSE: A plasma torch for the treatment of waste gas in an etching process is provided to efficiently decompose fluorine compound included in wasted gas by efficient generation of plasma. CONSTITUTION: A plasma torch(100) comprises a cathode electrode(110). The cathode electrode comprises an insulation part(111) formed in the upper part thereof. The insulation part insulates a cover(190) and a cathode electrode. The plasma torch comprises a top cover(130) placed on the outside of the cathode electrode. The cover seals the upper cover on the opened part of the upper cover. The first insulation part(140) has a working gas injector(140a) for supplying the working gas to the cathode electrode. A body(150) comprises a cooling hole(150a). A thermal insulator(180) is fixed and coupled with the inner wall of the body and the first insulation part.