发明名称 PHYSICAL STATE MEASURING APPARATUS AND PHYSICAL STATE MEASURING METHOD
摘要 The physical state measuring apparatus includes: a light source; a transmitting unit which transmits a light from the light source to a measurement point of an object to be measured; a nonlinear optical device which changes a wavelength of the light reflected by the measurement point to a wavelength that is different from the wavelength before the changing; a light receiving unit which receives the light whose wavelength has been changed; and a measuring unit which measures a physical state of the object to be measured at the measurement point based on a waveform of the light received by the light receiving unit.
申请公布号 US2012062870(A1) 申请公布日期 2012.03.15
申请号 US201113231037 申请日期 2011.09.13
申请人 YAMAWAKU JUN;KOSHIMIZU CHISHIO;MATSUDO TATSUO;NAGAI KENJI;TOKYO ELECTRON LIMITED 发明人 YAMAWAKU JUN;KOSHIMIZU CHISHIO;MATSUDO TATSUO;NAGAI KENJI
分类号 G01B9/02 主分类号 G01B9/02
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