发明名称 |
PHYSICAL STATE MEASURING APPARATUS AND PHYSICAL STATE MEASURING METHOD |
摘要 |
The physical state measuring apparatus includes: a light source; a transmitting unit which transmits a light from the light source to a measurement point of an object to be measured; a nonlinear optical device which changes a wavelength of the light reflected by the measurement point to a wavelength that is different from the wavelength before the changing; a light receiving unit which receives the light whose wavelength has been changed; and a measuring unit which measures a physical state of the object to be measured at the measurement point based on a waveform of the light received by the light receiving unit.
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申请公布号 |
US2012062870(A1) |
申请公布日期 |
2012.03.15 |
申请号 |
US201113231037 |
申请日期 |
2011.09.13 |
申请人 |
YAMAWAKU JUN;KOSHIMIZU CHISHIO;MATSUDO TATSUO;NAGAI KENJI;TOKYO ELECTRON LIMITED |
发明人 |
YAMAWAKU JUN;KOSHIMIZU CHISHIO;MATSUDO TATSUO;NAGAI KENJI |
分类号 |
G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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