发明名称 SEMICONDUCTOR DEIVCES AND METHODS OF FABRICATING THE SAME
摘要 PURPOSE: A semiconductor device and a fabricating method thereof are provided to minimize parasitic capacitance by forming an air gap between wirings. CONSTITUTION: A contact part(150c) is extended downwardly from one part of a lower surface of a wiring(150a). The contact part passes through a mold layer(110). The contact part has the same width as that of the wiring. A top inter layer dielectric(103) is arranged on the wiring. An air gap is formed between wirings.
申请公布号 KR20120025315(A) 申请公布日期 2012.03.15
申请号 KR20100087619 申请日期 2010.09.07
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 SIM, JAE HWANG;LEE, JONG MIN;SEONG, HO JUN
分类号 H01L21/3205;H01L21/28;H01L21/31 主分类号 H01L21/3205
代理机构 代理人
主权项
地址