发明名称 |
SEMICONDUCTOR DEIVCES AND METHODS OF FABRICATING THE SAME |
摘要 |
PURPOSE: A semiconductor device and a fabricating method thereof are provided to minimize parasitic capacitance by forming an air gap between wirings. CONSTITUTION: A contact part(150c) is extended downwardly from one part of a lower surface of a wiring(150a). The contact part passes through a mold layer(110). The contact part has the same width as that of the wiring. A top inter layer dielectric(103) is arranged on the wiring. An air gap is formed between wirings. |
申请公布号 |
KR20120025315(A) |
申请公布日期 |
2012.03.15 |
申请号 |
KR20100087619 |
申请日期 |
2010.09.07 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SIM, JAE HWANG;LEE, JONG MIN;SEONG, HO JUN |
分类号 |
H01L21/3205;H01L21/28;H01L21/31 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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