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发明名称
REFLEXIONSMASKENROHLING FÜR EUV-LITHOGRAPHIE
摘要
申请公布号
AT546759(T)
申请公布日期
2012.03.15
申请号
AT20070742437T
申请日期
2007.04.19
申请人
ASAHI GLASS COMPANY, LIMITED
发明人
HAYASHI, KAZUYUKI;KADOWAKI, KAZUO;SUGIYAMA, TAKASHI;MIKAMI, MASAKI
分类号
G03F7/22;G03F1/22;G03F1/24
主分类号
G03F7/22
代理机构
代理人
主权项
地址
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