| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a detection method capable of detecting a variation of a distance between a stator and a needle, an exposure method which carries out transfer exposure of a pattern on a substrate based on a detection result by means of this detection method, and a device manufacturing method which manufactures a device using this exposure method. <P>SOLUTION: A detection method makes a movable element move at a constant speed at a first speed along a first direction against a plurality of stator arranged along the first direction; detects a magnitude of a first thrust in the first direction of the movable element when being moved in the constant speed; makes the movable element move at a constant speed at a second speed different from the first speed along the first direction against a plurality of stator; detects a magnitude of a second thrust of the movable element in the first direction when carrying out the constant speed movement; calculates a magnitude of a cogging force which operates between the stator and the movable element by using the first and second speed, and the magnitude of the first and second thrust; and detects a variation of a distance between the stator and the movable element based on the magnitude of the cogging force calculated by the calculation step. <P>COPYRIGHT: (C)2012,JPO&INPIT |
