发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device and a method for manufacturing the same are disclosed. A recess gate structure is formed between an overlapping region between a gate and a source/drain so as to suppress increase in gate induced drain leakage (GIDL), and a gate insulation film is more thickly deposited in a region having weak GIDL, thereby reducing GIDL and thus improving refresh characteristics due to leakage current.
申请公布号 US2012061750(A1) 申请公布日期 2012.03.15
申请号 US201113230776 申请日期 2011.09.12
申请人 CHUNG WOO YOUNG;HYNIX SEMICONDUCTOR INC. 发明人 CHUNG WOO YOUNG
分类号 H01L29/78;H01L21/28 主分类号 H01L29/78
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