METHOD OF CUTTING OUT GRAPH WITHIN SPECIFIC TIME PERIOD

摘要

Provided is a technology capable of effectively changing the display area of vacuum-processed measured values. When processing in a vacuum tank an object to be processed, a preliminarily determined operation changing time changed by the operation of a processing device is defined as a temporary display time and the a stored measured value is graphically displayed on a screen from the temporary display time. When no effective information is obtained, if among other operation changing times of the processing device, an operation changing time prior to the temporary display time is defined as the display start time, and curved lines (L12, L22) connecting the measured values are displayed, then the causes of defects and so forth, which could not be found in the measured values after the temporary display start position, can be found.