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发明名称
Electron beam deposited ceramic coating members with plasma resistance
摘要
申请公布号
KR101123719(B1)
申请公布日期
2012.03.15
申请号
KR20090050123
申请日期
2009.06.05
申请人
发明人
分类号
C23C4/10;C23C28/00;H01L21/02
主分类号
C23C4/10
代理机构
代理人
主权项
地址
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