Substrate manufacturing apparatus, and method of vacuum pumping and venting thereof,申请号KR20050080104-传众专利搜索

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发明名称	Substrate manufacturing apparatus, and method of vacuum pumping and venting thereof
摘要
申请公布号	KR101121419(B1)	申请公布日期	2012.03.15
申请号	KR20050080104	申请日期	2005.08.30
申请人		发明人
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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