摘要 |
<p>This invention provides a floating zone melting apparatus of an infrared intensive heating system in which a temperature gradient in the circumferential direction of a sample in a molten part is small, a temperature gradient in the vertical direction thereof is steep, a satisfactorily high maximum achieving temperature can be realized, and a stable molten state can be achieved. In a floating zone melting apparatus of a four elliptical mirror type comprising a rotary ellipsoidal reflecting mirror 2 disposed opposite to each other on an orthogonal axis, the eccentricity of the rotary ellipsoidal reflecting mirror 2 is in the range of 0.4 to 0.65, and the ratio of a depth of the rotary ellipsoidal reflecting mirror 2 to a diameter of an opening in the rotary ellipsoidal reflecting mirror 2 is in the range of 0.38 to 0.75. Moreover, a glass mirror is used as the rotary ellipsoidal reflecting mirror 2. Furthermore, the rotary ellipsoidal reflecting mirror 2 is disposed in such a manner that a straight line from one focal point to the other focal point is slanted downward, and infrared rays reflected from the reflecting surface are irradiated to a sample from an oblique upper direction, whereby a single crystal of a large diameter can be grown.</p> |