MEASUREMENT DEVICE AND MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique to enhance fluorescent light in a technique to measuring fluorescent light of a thin film.

SOLUTION: A measurement device measures the fluorescent light of a thin film 12, and includes a transparent member supporting section for supporting a prism 10 in which a thin film sample 13 including the thin film 12 is laminated in an environment comprising an arbitrary medium or vacuum; excitation means for increasing light absorption in the thin film sample 13 by radiating light L1 from the prism 10 side with a specific incident angle of a critical angle at an interface between the prism 10 and the environment or more; and fluorescent light measuring means for measuring fluorescent light L3 from the thin film 12 which is enhanced by increasing the light absorption.

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