发明名称 |
DOSE-DATA GENERATING APPARATUS, DOSE-DATA GENERATING METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE |
摘要 |
According to one embodiment, generating virtual data by mirroring data based on a dimension measurement result in a measurement region on an inner side of a shot region to a non-shot region on an outer side of a shot edge, and calculating dose data of the measurement region and a non-measurement region based on data in the measurement region and the virtual data are included.
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申请公布号 |
US2012066653(A1) |
申请公布日期 |
2012.03.15 |
申请号 |
US201113168215 |
申请日期 |
2011.06.24 |
申请人 |
OKAMOTO YOSUKE;KOIKE TAKASHI |
发明人 |
OKAMOTO YOSUKE;KOIKE TAKASHI |
分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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