METHOD OF POLISHING OBJECT TO BE POLISHED AND POLISHING PAD

摘要

The present invention provides: a method of polishing an object to be polished for processing a surface of the object to be polished into a concave or convex state with a high degree of accuracy; and a polishing pad. An object to be polished 20 is placed on a polishing pad 10 over the boundary between the first polishing region 11 and the second polishing region 12, the first polishing region 11 has grooves and the second polishing region 12 has grooves different from those of the first polishing region 11, and either one of the two regions being formed on a region on the center side, and the other on the outer side in a radial direction on the surface of the polishing pad; and the object to be polished 20 is polished by rotating the polishing pad 10 and the object to be polished 20.