| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a beam irradiation device capable of simplifying the action of a wiring member when a moving portion acts, suppressing variations of a load applying from the wiring member to the moving portion, and suppressing a break of the wiring member. <P>SOLUTION: A mirror actuator 100 comprises a mirror holder 110 which can rotate about spindles 111, 112, a mirror 113 installed to the mirror holder 110, and a coil 114 arranged on the mirror holder 110. A first FPC 10 is electrically connected to the coil 114, and has flexibility. The first FPC 10 is adhered to a moving frame 120 so as to bridge the coil 114 and the moving frame 120. <P>COPYRIGHT: (C)2012,JPO&INPIT |
