| 摘要 |
A technique for allowing users to efficiently specify a region of interest (ROD on a sample for a certain physical quantity (e.g. phase) other than the altitude is provided. A range-indicating image 34 showing a range that can be observed on a sample is displayed on a navigation window 33 in a sample observation display screen 30. An ROI-indicating frame 35 for specifying a magnified observation range is superposed on the range-indicating image 34. A list of thumbnails of previously taken magnified images for the same sample is displayed on an image history display window 32. When an observer selects any image from this list, the thumbnail of the selected image is mapped onto the range-indicating image 34. With reference to this image, the observer can change the position, size and/or angle of the ROI-indicating frame 35 by a mouse operation. In response to this operation, a magnified image of the sample within the new ROI is acquired.
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