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发明名称
SILICON CARBIDE POLISHING METHOD UTILIZING WATER-SOLUBLE OXIDIZERS
摘要
申请公布号
MY145601(A)
申请公布日期
2012.03.15
申请号
MY2009PI00855
申请日期
2007.09.04
申请人
CABOT MICROELECTRONICS CORPORATION
发明人
DESAI, MUKESH;MOEGGENBORG, KEVIN;CARTER, PHILLIP
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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