DELIVERY DEVICE AND METHOD OF USE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a delivery device that can deliver a uniform and high concentration of precursor vapor throughout the process up to depletion of the solid precursor compound from the delivery device.

SOLUTION: A delivery device 100 comprises an inlet port 104 and an outlet port 108. The delivery device comprises an inlet chamber 114 and an outlet chamber 120, with the outlet chamber being opposedly disposed to the inlet chamber and in fluid communication with the inlet chamber via a conical section 116. The outlet chamber comprises a labyrinth 110 that is operative to prevent solid particles of a solid precursor compound contained in the delivery device from leaving the delivery device while at the same time permitting vapors of the solid precursor compound to leave the delivery device via the outlet port.

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