发明名称 LARGE-FIELD UNIT-MAGNIFICATION CATADIOPTRIC PROJECTION SYSTEM
摘要 A unit magnification projection optical system includes, listed in order along a system axis, a mirror, a lens group having negative power and a lens group having positive power. The optical system is a symmetric system, with an object plane on one side of the system axis and an object plane on an opposite side of the system axis. The object and image planes are spaced apart from the positive lens group by a working distance greater than 100 millimeters.
申请公布号 WO2012033685(A1) 申请公布日期 2012.03.15
申请号 WO2011US49866 申请日期 2011.08.31
申请人 COHERENT, INC.;MERCADO, ROMEO, I. 发明人 MERCADO, ROMEO, I.
分类号 G02B17/08;G03F7/20 主分类号 G02B17/08
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