MICROWAVE PLASMA PROCESSING APPARATUS, DIELECTRIC WINDOW FOR USE IN THE MICROWAVE PLASMA PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING THE DIELECTRIC WINDOW,申请号KR20090016960-传众专利搜索

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发明名称	MICROWAVE PLASMA PROCESSING APPARATUS, DIELECTRIC WINDOW FOR USE IN THE MICROWAVE PLASMA PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING THE DIELECTRIC WINDOW
摘要
申请公布号	KR101122108(B1)	申请公布日期	2012.03.15
申请号	KR20090016960	申请日期	2009.02.27
申请人		发明人
分类号	H05H1/46;H01L21/205;H01L21/3065	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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